EBSD is an SEM based technique that can be used to analyse the diffraction patterns generated when an electron beam interacts with a crystalline sample. The diffraction patterns are imaged on a phosphor screen and analysed by the HKL Channel5
software to determine the orientation of the crystal structure. The technique can be used to analyse:
Analyses can be done as individual points or by mapping of areas of the sample surface. The resolution of the technique is <1 Ám.
For further details about EBSD and sample requirements please contact the SEM staff.